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by Harland G. Tompkins
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ISBN: 0486450287 Dover Publications Price: $16.95 |
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This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 14 case studies illustrate concepts and applications. Three appendices provide helpful references. 1993 edition.
Table of Contents for A User's Guide to Ellipsometry
| 1. Theoretical Aspects | |||||||
| 2. Instrumentation | |||||||
| 3. Using Optical Parameters to Determine Material Properties | |||||||
| 4. Determining Optical Parameters for Inaccessible Substrates and Unknown Films | |||||||
| 5. Extremely Thin Films | |||||||
| 6. The Special Case of Polysilicon | |||||||
| 7. The Effect of Roughness | |||||||
| Case Studies | |||||||
| Case 1. Dissolution and Swelling of Thin Polymer Films | |||||||
| Case 2. Ion Beam Interaction with Silicon | |||||||
| Case 3. Dry Oxidation of Metals | |||||||
| Case 4. Optical Properties of Sputtered Chromium Suboxide Thin Films | |||||||
| Case 5. Ion-assisted Film Growth of Zirconium Dioxide | |||||||
| Case 6. Electrochemical/Ellipsometric Studies of Oxides on Metals | |||||||
| Case 7. Amorphous Hydrogenated Carbon Films | |||||||
| Case 8. Fluoropolymer Films on Silicon from Reactive Ion Etching | |||||||
| Case 9. Various Films on InP | |||||||
| Case 10. Benzotriazole and Benzimidazole on Copper | |||||||
| Case 11. Gas Adsorption on Metal Surfaces | |||||||
| Case 12. Silicon-Germanium Thin Films | |||||||
| Case 13. Profiling of HgCdTe | |||||||
| Case 14. Oxides and Nitrides of Silicon | |||||||
| Appendices |